90v to 70v OAR Upgrade

Benefits of new "Z" style bipolar motors and drivers

Improved operating characteristics
Reduced harmonics, quite, smooth operation
means less vibration at the wafer Efficiency
Higher torque output across operating range
Cooler operating temperature for longer service life Serviceability
Replaceable motor cables
Ease of trouble-shooting
Motor replacement no longer required for a bad cable
Industry standard replacement components
Old C-Drive components are obsolete
100% Compatible with OEM components

Upgrades & Enhancements

OAR Novellus Robot, RFG 5500, Brooks Robots Refurbishment

New Refurbishment Programs

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90v to 70v OAR Upgrade

Reduced harmonics, quite, smooth operation means less vibration at the wafer Efficiency.

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Quad PS to MegaPak PS

The megapak replaces the now obsolete Quad supplies, old 5V supply and Robot Power supply.

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