Component Refurbishment Programs

OAR Novellus Robot
Plug and play upgrades and 90v to 70v or standard 90v refurb programs. OAR robot refurb programs available with short to no lead time.

RFG 5500
As a continued support structure for the Novellus legacy tool set Focus Spares has stocked both as is and refurbished (with warranty) RFG 5500 high frequency generators. We have a limited supply to sell in an outright buy capacity, however we do offer a core exchange program with a very short, if any, lead time.

Brooks Robots

Refurbishment programs available, Contact us for more details.

Upgrades & Enhancements

OAR Novellus Robot, RFG 5500, Brooks Robots Refurbishment

New Refurbishment Programs

90v to 70v OAR Upgrade

Reduced harmonics, quite, smooth operation means less vibration at the wafer Efficiency.

Quad PS to MegaPak PS

The megapak replaces the now obsolete Quad supplies, old 5V supply and Robot Power supply.