Quad PS to MegaPak PS

The Megapak replaces the now obsolete Quad supplies, old 5V supply and Robot Power supply. The Megapak is a modular design, each module is independently replaceable and hot swappable, making recovery from failure faster and easier.

Upgrades & Enhancements

OAR Novellus Robot, RFG 5500, Brooks Robots Refurbishment

New Refurbishment Programs

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90v to 70v OAR Upgrade

Reduced harmonics, quite, smooth operation means less vibration at the wafer Efficiency.

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Quad PS to MegaPak PS

The megapak replaces the now obsolete Quad supplies, old 5V supply and Robot Power supply.

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